《先進光學元件微納製造與精密檢測技術》是2014年11月出版的圖書，作者是郭隱彪、楊平、王振忠。
基本介紹
- 書名：先進光學元件微納製造與精密檢測技術
- 作者：郭隱彪、楊平、王振忠等
- ISBN：978-7-118-09613-2
- 出版時間：2014年11月
- 裝幀：精裝
- 開本：16
出版信息,內容簡介,目錄,中文目錄,英文目錄,
出版信息
書名先進光學元件微納製造與精密檢測技術
書號978-7-118-09613-2
作者郭隱彪、楊平、王振忠等
出版時間2014年11月
譯者
版次1版1次
開本16
裝幀精裝
出版基金國防科技圖書出版基金
頁數320
字數403
中圖分類TH74
叢書名
定價108.00
內容簡介
本書對目前主流平板顯示技術的驅動技術做了較為全面的敘述。全書分為8章。內容包括：平板顯示器件的工作原理及顯示器件的驅動技術基礎，LCD的無源和有源驅動技術，LED、OL ED和ELD的驅動技術以及PDP的驅動技術。
本書是在電子科技大學“顯示器件驅動技術”課程的基礎上，對信息顯示與光電技術專業多年的教學、科研和實驗成果進行總結編寫而成的。本書採用模組形式，既可作為大專院校光電子技術、物理電子技術、通信等相關專業的本科生和研究生教材，也可供廣大科技工作者、工程技術和研發人員參考。
目錄
中文目錄
第1章緒論1
1.1先進光學元件的套用及製造技術要求1
1.1.1先進光學元件的特點1
1.1.2先進光學元件的套用2
1.1.3先進光學元件的製造技術要求6
1.1.4先進光學元件的製造技術範疇10
1.2先進光學元件的製造技術14
1.2.1光學元件的模壓成形技術15
1.2.2光學元件的精密切削技術16
1.2.3光學元件的精密磨削加工技術19
1.2.4光學元件精密研拋技術21
1.2.5精密光學加工環境控制技術24
1.3先進光學元件的檢測與評價技術25
1.3.1先進光學元件的檢測要求及難點25
1.3.2光學元件的檢測技術27
1.3.3光學誤差的評價方法29
參考文獻31
第2章先進光學元件加工裝備技術33
2.1工具機設計理論33
2.1.1工具機設計要求33
2.1.2工具機設計方法35
2.2超精密工具機關鍵部件及技術44
2.2.1主軸部件46
2.2.2直線導軌部件50
2.2.3微位移進給部件52
2.3超精密工具機數控技術55
2.3.1數控技術55
2.3.2超精密加工數控系統60
2.3.3開放式數控系統66
2.3.4超精密磨床數控電氣設計實例69
2.4超精密磨削加工裝備70
2.4.1超精密加工裝備技術綜述70
2.4.2超精密磨削成形工具機74
2.5超精密加工工具技術78
2.5.1超精密切削加工刀具技術78
2.5.2超精密磨削砂輪技術81
參考文獻83
第3章先進光學元件磨削技術
84
3.1超精密磨削加工發展84
3.1.1先進光學元件磨削技術概述84
3.1.2延性磨削和鏡面磨削85
3.2超精密磨削過程分析88
3.2.1超精密磨削機理88
3.2.2磨削過程基本參數89
3.3超精密磨削加工關鍵技術94
3.4砂輪修整 96
3.4.1杯形砂輪修整97
3.4.2ELID線上電解修整101
3.4.3放電修整103
3.4.4雷射修整105
3.4.5微小型磨削砂輪修整技術107
3.5非球面磨削加工技術108
1.1先進光學元件的套用及製造技術要求1
1.1.1先進光學元件的特點1
1.1.2先進光學元件的套用2
1.1.3先進光學元件的製造技術要求6
1.1.4先進光學元件的製造技術範疇10
1.2先進光學元件的製造技術14
1.2.1光學元件的模壓成形技術15
1.2.2光學元件的精密切削技術16
1.2.3光學元件的精密磨削加工技術19
1.2.4光學元件精密研拋技術21
1.2.5精密光學加工環境控制技術24
1.3先進光學元件的檢測與評價技術25
1.3.1先進光學元件的檢測要求及難點25
1.3.2光學元件的檢測技術27
1.3.3光學誤差的評價方法29
參考文獻31
第2章先進光學元件加工裝備技術33
2.1工具機設計理論33
2.1.1工具機設計要求33
2.1.2工具機設計方法35
2.2超精密工具機關鍵部件及技術44
2.2.1主軸部件46
2.2.2直線導軌部件50
2.2.3微位移進給部件52
2.3超精密工具機數控技術55
2.3.1數控技術55
2.3.2超精密加工數控系統60
2.3.3開放式數控系統66
2.3.4超精密磨床數控電氣設計實例69
2.4超精密磨削加工裝備70
2.4.1超精密加工裝備技術綜述70
2.4.2超精密磨削成形工具機74
2.5超精密加工工具技術78
2.5.1超精密切削加工刀具技術78
2.5.2超精密磨削砂輪技術81
參考文獻83
第3章先進光學元件磨削技術
84
3.1超精密磨削加工發展84
3.1.1先進光學元件磨削技術概述84
3.1.2延性磨削和鏡面磨削85
3.2超精密磨削過程分析88
3.2.1超精密磨削機理88
3.2.2磨削過程基本參數89
3.3超精密磨削加工關鍵技術94
3.4砂輪修整 96
3.4.1杯形砂輪修整97
3.4.2ELID線上電解修整101
3.4.3放電修整103
3.4.4雷射修整105
3.4.5微小型磨削砂輪修整技術107
3.5非球面磨削加工技術108
3.5.1微小非球面加工技術108
3.5.2大口徑非球面磨削加工技術112
3.5.3自由曲面磨削加工技術118
3.6工藝軟體設計開發123
3.6.1數控編程格式124
3.6.2微小型非球面工藝軟體開發實例126
3.6.3大口徑非球面工藝軟體開發實例128
3.7超聲振動複合磨削加工技術133
3.8加工實例135
參考文獻139
第4章先進光學元件拋光技術140
4.1超精密拋光加工發展140
4.2平面光學元件拋光技術143
4.2.1平面拋光原理143
4.2.2平面拋光軌跡控制143
4.2.3平面拋光材料去除模型148
4.3非球面光學元件拋光技術162
4.3.1非球面氣囊拋光原理162
4.3.2軸對稱非球面氣囊拋光進動運動控制164
4.3.3自由曲面氣囊拋光進動運動控制174
4.3.4氣囊拋光材料去除模型183
參考文獻187
3.5.2大口徑非球面磨削加工技術112
3.5.3自由曲面磨削加工技術118
3.6工藝軟體設計開發123
3.6.1數控編程格式124
3.6.2微小型非球面工藝軟體開發實例126
3.6.3大口徑非球面工藝軟體開發實例128
3.7超聲振動複合磨削加工技術133
3.8加工實例135
參考文獻139
第4章先進光學元件拋光技術140
4.1超精密拋光加工發展140
4.2平面光學元件拋光技術143
4.2.1平面拋光原理143
4.2.2平面拋光軌跡控制143
4.2.3平面拋光材料去除模型148
4.3非球面光學元件拋光技術162
4.3.1非球面氣囊拋光原理162
4.3.2軸對稱非球面氣囊拋光進動運動控制164
4.3.3自由曲面氣囊拋光進動運動控制174
4.3.4氣囊拋光材料去除模型183
參考文獻187
第5章先進光學元件精密檢測技術191
5.1基於坐標測量的非球面元件檢測技術191
5.1.1擺臂式輪廓檢測法192
5.1.2長行程輪廓檢測法201
5.1.3五稜鏡輪廓檢測法202
5.2基於波面干涉測量的非球面檢測技術205
5.2.1零位干涉檢測技術206
5.2.2非零位干涉檢測技術211
5.3光學非球面精密檢測平台216
5.3.1小型光學非球面精密檢測平台216
5.3.2大型光學非球面精密檢測平台220
參考文獻224
第6章先進光學元件精密檢測中的數據處理技術229
6.1先進光學元件檢測軌跡規劃229
6.1.1基於坐標測量的軌跡規劃229
6.1.2基於子孔徑干涉測量的軌跡規劃237
6.2大口徑光學元件檢測中的數據處理技術238
6.2.1分段輪廓測量的數據處理技術238
6.2.2子孔徑拼接的數據處理技術243
6.3光學元件線上檢測系統數據處理技術研究249
6.3.1數據處理系統總體設計249
6.3.2數據預處理249
6.3.3誤差補償及結果252
參考文獻257
第7章先進光學元件製造加工環境監控技術259
5.1基於坐標測量的非球面元件檢測技術191
5.1.1擺臂式輪廓檢測法192
5.1.2長行程輪廓檢測法201
5.1.3五稜鏡輪廓檢測法202
5.2基於波面干涉測量的非球面檢測技術205
5.2.1零位干涉檢測技術206
5.2.2非零位干涉檢測技術211
5.3光學非球面精密檢測平台216
5.3.1小型光學非球面精密檢測平台216
5.3.2大型光學非球面精密檢測平台220
參考文獻224
第6章先進光學元件精密檢測中的數據處理技術229
6.1先進光學元件檢測軌跡規劃229
6.1.1基於坐標測量的軌跡規劃229
6.1.2基於子孔徑干涉測量的軌跡規劃237
6.2大口徑光學元件檢測中的數據處理技術238
6.2.1分段輪廓測量的數據處理技術238
6.2.2子孔徑拼接的數據處理技術243
6.3光學元件線上檢測系統數據處理技術研究249
6.3.1數據處理系統總體設計249
6.3.2數據預處理249
6.3.3誤差補償及結果252
參考文獻257
第7章先進光學元件製造加工環境監控技術259
7.1超精密加工環境監控技術概述259
7.1.1加工環境監控與診斷技術進展260
7.1.2嵌入式無線監控和診斷技術進展261
7.2超精密加工環境無線監控系統原理262
7.2.1加工環境無線監控系統構成262
7.2.2加工環境無線監控對象263
7.2.3加工環境無線監控系統網路265
7.3加工環境無線監控系統技術體系266
7.3.1系統硬體組成266
7.3.2系統軟體組成270
7.4加工環境無線監控系統監控實例273
參考文獻279
第8章光學元件製造的亞表面損傷檢測與控制
282
8.1亞表面損傷概述282
8.1.1表面質量與完整性的研究內容282
8.1.2亞表面損傷的表現形式284
8.1.3亞表面損傷對元件光學性能的影響291
8.2亞表面損傷的形成機理292
8.2.1亞表面裂紋的形成機理293
8.2.2亞表面層殘餘應力的形成機理296
8.2.3亞表面層材料組織變化機理298
8.3亞表面損傷的檢測與評價300
8.3.1損傷性檢測技術300
8.3.2無損檢測技術304
8.3.3亞表面損傷的評價306
8.3.4亞表面損傷的預測308
8.4光學元件製造的亞表面損傷控制311
8.4.1脆性材料的延展性去除加工技術311
8.4.2脆性材料的半延展性去除加工技術313
參考文獻314
7.1.1加工環境監控與診斷技術進展260
7.1.2嵌入式無線監控和診斷技術進展261
7.2超精密加工環境無線監控系統原理262
7.2.1加工環境無線監控系統構成262
7.2.2加工環境無線監控對象263
7.2.3加工環境無線監控系統網路265
7.3加工環境無線監控系統技術體系266
7.3.1系統硬體組成266
7.3.2系統軟體組成270
7.4加工環境無線監控系統監控實例273
參考文獻279
第8章光學元件製造的亞表面損傷檢測與控制
282
8.1亞表面損傷概述282
8.1.1表面質量與完整性的研究內容282
8.1.2亞表面損傷的表現形式284
8.1.3亞表面損傷對元件光學性能的影響291
8.2亞表面損傷的形成機理292
8.2.1亞表面裂紋的形成機理293
8.2.2亞表面層殘餘應力的形成機理296
8.2.3亞表面層材料組織變化機理298
8.3亞表面損傷的檢測與評價300
8.3.1損傷性檢測技術300
8.3.2無損檢測技術304
8.3.3亞表面損傷的評價306
8.3.4亞表面損傷的預測308
8.4光學元件製造的亞表面損傷控制311
8.4.1脆性材料的延展性去除加工技術311
8.4.2脆性材料的半延展性去除加工技術313
參考文獻314
英文目錄
Contents〖KH2D〗
Chapter 1Introduction1
1.1The application and the manufacturing technical requirements of advanced optics1
1.1.1Characteristics of advanced optics1
1.1.2Applications of advanced optics2
1.1.3Manufacturing technical requirements of advanced optics6
1.1.4Manufacturing technology categories of advanced optics10
1.2Manufacturing technology of advanced optics14
1.2.1Die forming technology of advanced optics15
1.2.2Precision cutting technology of advanced optics16
1.2.3Precision grinding processing technology of advancedoptics19
1.2.4Precision polishing technology of advanced optics21
1.2.5Environmental control technology for precision optical processing24
1.3Testing and evaluation technology of advanced optics25
1.3.1Detection requirements and difficulties of advanced optics25
1.3.2Detection technology of advanced optics27
1.3.3Evaluation methods of Optical error29
References31
Chapter 2Processing and equipment technology of advanced optics33
2.1Machine tool design theory33
2.1.1Design requirements of machine tool33
2.1.2Design meihods of machine tool35
2.2Key parts and technology of ultra precision machine tool44
Chapter 1Introduction1
1.1The application and the manufacturing technical requirements of advanced optics1
1.1.1Characteristics of advanced optics1
1.1.2Applications of advanced optics2
1.1.3Manufacturing technical requirements of advanced optics6
1.1.4Manufacturing technology categories of advanced optics10
1.2Manufacturing technology of advanced optics14
1.2.1Die forming technology of advanced optics15
1.2.2Precision cutting technology of advanced optics16
1.2.3Precision grinding processing technology of advancedoptics19
1.2.4Precision polishing technology of advanced optics21
1.2.5Environmental control technology for precision optical processing24
1.3Testing and evaluation technology of advanced optics25
1.3.1Detection requirements and difficulties of advanced optics25
1.3.2Detection technology of advanced optics27
1.3.3Evaluation methods of Optical error29
References31
Chapter 2Processing and equipment technology of advanced optics33
2.1Machine tool design theory33
2.1.1Design requirements of machine tool33
2.1.2Design meihods of machine tool35
2.2Key parts and technology of ultra precision machine tool44
2.2.1Spindle components46
2.2.2Linear guide components50
2.2.3Micro displacement feed components52
2.3NC technology of ultra precision machine tool55
2.3.1Numerical control technology55
2.3.2Ultra precision machining for CNC system60
2.3.3Open numerical control system66
2.3.4Electrical design example of numerical control for ultraprecision grinding machine 69
2.4Ultra-precision grinding equipment70
2.4.1Review of ultra precision machining equipment and Technology 70
2.4.2Ultra precision grinding forming machine74
2.5Ultra-precision machining tools technology78
2.5.1Ultra precision cutting tool technology78
2.5.2Ultra precision grinding technology81
References83
Chapter 3Grinding technology of advanced optics84
3.1Development of ultra-precision grinding processing 84
3.1.1Overview of grinding technology for advanced optics 84
3.1.2Ductile grinding and mirror grinding85
3.2Process analysis of ultra-precision grinding88
3.2.1Ultra precision grinding mechanism88
3.2.2Basic parameters of the grinding process89
3.3Key technology of ultra-precision grinding94
3.4Grinding wheel dressing96
3.4.1Cup wheel dressing97
3.4.2ELID dressing101
3.4.3Contact discharge dressing103
3.4.4Laser dressing105
3.4.5Grinding wheel dressing technology of micro aspherics107
3.5Grinding technology for aspheric surface108
3.5.1Processing technology of micro aspherics108
3.5.2Grinding technology of large aspherics 112
3.5.3Grinding processing technology of free surface118
3.6Design and development of process software123
3.6.1Format of NC programming124
3.6.2Examples of software development for micro aspheric technology126
3.6.3Examples of software development for large aspheric technology128
3.7Ultrasonic vibration of grinding technology133
3.8Manufacture instance135
References139
Chapter 4Polishing technology of advanced optics140
4.1Development of ultra-precision polishing processing140
4.2Polishing technology for plane optics143
4.2.1Principle of surface polishing143
4.2.2Surface polishing trajectory control143
4.2.3Material removal model of plane polishing148
4.3Polishing technology for aspheric optics162
4.3.1Bonnet polishing principle for aspheric optics162
4.3.2Bonnet polishing precession control for axisymmetric aspherics164
4.3.3Bonnet polishing precession control for freeform surface 174
4.3.4Material removal model of bonnet polishing183
References187
Chapter 5Precision measuring technology of advanced optics191
5.1Aspheric surface measuring technology based on coordinate measuring191
5.1.1Detection method based on swing arm profiler192
5.1.2Detection method based on long trace profiler201
5.1.3Detection method based on penta prism profiler202
5.2Aspheric surface measuring technology based on wavefront testing 205
5.2.1Detection technology of null interference206
5.2.2Detection technology of non null interference211
5.3Precision measuring platform for optical aspheric surface216
5.3.1Precision measuring platform for small size optical aspherics216
2.2.2Linear guide components50
2.2.3Micro displacement feed components52
2.3NC technology of ultra precision machine tool55
2.3.1Numerical control technology55
2.3.2Ultra precision machining for CNC system60
2.3.3Open numerical control system66
2.3.4Electrical design example of numerical control for ultraprecision grinding machine 69
2.4Ultra-precision grinding equipment70
2.4.1Review of ultra precision machining equipment and Technology 70
2.4.2Ultra precision grinding forming machine74
2.5Ultra-precision machining tools technology78
2.5.1Ultra precision cutting tool technology78
2.5.2Ultra precision grinding technology81
References83
Chapter 3Grinding technology of advanced optics84
3.1Development of ultra-precision grinding processing 84
3.1.1Overview of grinding technology for advanced optics 84
3.1.2Ductile grinding and mirror grinding85
3.2Process analysis of ultra-precision grinding88
3.2.1Ultra precision grinding mechanism88
3.2.2Basic parameters of the grinding process89
3.3Key technology of ultra-precision grinding94
3.4Grinding wheel dressing96
3.4.1Cup wheel dressing97
3.4.2ELID dressing101
3.4.3Contact discharge dressing103
3.4.4Laser dressing105
3.4.5Grinding wheel dressing technology of micro aspherics107
3.5Grinding technology for aspheric surface108
3.5.1Processing technology of micro aspherics108
3.5.2Grinding technology of large aspherics 112
3.5.3Grinding processing technology of free surface118
3.6Design and development of process software123
3.6.1Format of NC programming124
3.6.2Examples of software development for micro aspheric technology126
3.6.3Examples of software development for large aspheric technology128
3.7Ultrasonic vibration of grinding technology133
3.8Manufacture instance135
References139
Chapter 4Polishing technology of advanced optics140
4.1Development of ultra-precision polishing processing140
4.2Polishing technology for plane optics143
4.2.1Principle of surface polishing143
4.2.2Surface polishing trajectory control143
4.2.3Material removal model of plane polishing148
4.3Polishing technology for aspheric optics162
4.3.1Bonnet polishing principle for aspheric optics162
4.3.2Bonnet polishing precession control for axisymmetric aspherics164
4.3.3Bonnet polishing precession control for freeform surface 174
4.3.4Material removal model of bonnet polishing183
References187
Chapter 5Precision measuring technology of advanced optics191
5.1Aspheric surface measuring technology based on coordinate measuring191
5.1.1Detection method based on swing arm profiler192
5.1.2Detection method based on long trace profiler201
5.1.3Detection method based on penta prism profiler202
5.2Aspheric surface measuring technology based on wavefront testing 205
5.2.1Detection technology of null interference206
5.2.2Detection technology of non null interference211
5.3Precision measuring platform for optical aspheric surface216
5.3.1Precision measuring platform for small size optical aspherics216
5.3.2Precision measuring platform for large size optical aspherics220
References224
Chapter 6Data processing technology of precision measurement for advanced optics 229
6.1Measurement Trajectory planning for advanced optics229
6.1.1Trajectory planning based on coordinate measuring229
6.1.2Trajectory planning based on sub aperture interferometry237
6.2Data processing technology of measurement for large aperture optics238
6.2.1Data processing technology of profile stitching method238
6.2.2Data processing technology of sub aperture stitching method243
6.3Data processing technology of on-line measurement system for optics 249
6.3.1Overall design of data processing system249
6.3.2Data preprocessing249
6.3.3Error compensation and results252
References257
Chapter 7Monitoring technology of manufacturing environment for advanced optics259
7.1Summary of monitor technology for ultra-precision machining environment259
7.1.1Progress in processing environment monitoring and diagnosis technology260
7.1.2Development of embedded wireless monitoring and diagnosis technology261
7.2Principle of wireless monitoring systerm for ultra-precision machining environment262
7.2.1Wireless monitoring system for machining environment262
7.2.2Wireless monitoring object of processing environment263
7.2.3Network of wireless monitoring system of processing environment265
7.3Wireless monitoring system technology system for processing environment266
7.3.1Composition of system hardware266
7.3.2Composition of system software270
7.4Monitoring instance of wireless monitoring system for machining environment273
References279
Chapter 8Sub surface damage detection and control technology for optics manufacturing.282
8.1Description of sub surface damage282
8.1.1Research contents of surface quality and integrity282
8.1.2Form of sub surface damage284
8.1.3Sub surface damage effect on optical properties of elements291
8.2Formation mechanism of sub surface damage292
8.2.1Formation mechanism of sub surface crack293
8.2.2Forming mechanism of residual stress in sub surface layer296
8.2.3Mechanism of organizational change of sub surface layer material 298
8.3Testing and evaluation of sub surface damage300
8.3.1Damage detection technology300
8.3.2Nondestructive detection technology304
8.3.3Evaluation of sub surface damage306
8.3.4Prediction of sub surface damage308
8.4Sub surface damage control for optics manufacturing311
8.4.1Ductility removal machining technology of brittle material 311
8.4.2Semi ductile removal Machining technology of brittle material313
References314
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References224
Chapter 6Data processing technology of precision measurement for advanced optics 229
6.1Measurement Trajectory planning for advanced optics229
6.1.1Trajectory planning based on coordinate measuring229
6.1.2Trajectory planning based on sub aperture interferometry237
6.2Data processing technology of measurement for large aperture optics238
6.2.1Data processing technology of profile stitching method238
6.2.2Data processing technology of sub aperture stitching method243
6.3Data processing technology of on-line measurement system for optics 249
6.3.1Overall design of data processing system249
6.3.2Data preprocessing249
6.3.3Error compensation and results252
References257
Chapter 7Monitoring technology of manufacturing environment for advanced optics259
7.1Summary of monitor technology for ultra-precision machining environment259
7.1.1Progress in processing environment monitoring and diagnosis technology260
7.1.2Development of embedded wireless monitoring and diagnosis technology261
7.2Principle of wireless monitoring systerm for ultra-precision machining environment262
7.2.1Wireless monitoring system for machining environment262
7.2.2Wireless monitoring object of processing environment263
7.2.3Network of wireless monitoring system of processing environment265
7.3Wireless monitoring system technology system for processing environment266
7.3.1Composition of system hardware266
7.3.2Composition of system software270
7.4Monitoring instance of wireless monitoring system for machining environment273
References279
Chapter 8Sub surface damage detection and control technology for optics manufacturing.282
8.1Description of sub surface damage282
8.1.1Research contents of surface quality and integrity282
8.1.2Form of sub surface damage284
8.1.3Sub surface damage effect on optical properties of elements291
8.2Formation mechanism of sub surface damage292
8.2.1Formation mechanism of sub surface crack293
8.2.2Forming mechanism of residual stress in sub surface layer296
8.2.3Mechanism of organizational change of sub surface layer material 298
8.3Testing and evaluation of sub surface damage300
8.3.1Damage detection technology300
8.3.2Nondestructive detection technology304
8.3.3Evaluation of sub surface damage306
8.3.4Prediction of sub surface damage308
8.4Sub surface damage control for optics manufacturing311
8.4.1Ductility removal machining technology of brittle material 311
8.4.2Semi ductile removal Machining technology of brittle material313
References314
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