教育經歷
2005年畢業於
清華大學精密儀器與機械學系,獲工學學士學位;
研究方向
摩擦學、表界面理論與技術。具體如下:納米至原子尺度下表面間相互作用機理研究;納米摩擦學,摩擦機理研究;半導體製造工藝中的化學機械拋光技術及超淨表面製備技術;掃描探針顯微鏡在微納米尺度摩擦學方面的套用研究。
代表論文
[1]Huang Y T, Li Y, Guo D, et al. Probing particle removal in brush scrubber cleaning with fluorescence technique. Sci China Tech Sci, 2013, 56:2994-3000
[2]Yating Huang, Dan Guo, Xinchun Lu, Jianbin Luo,Modeling of particle removal processes in brush scrubber cleaning,Wear, Volume 273, Issue 1, November 2011, Pages 105-110
[3]黃雅婷,孟春玲,董秀萍,路新春,銅互連兆聲清洗中結構損傷預測的有限元分析,光學精密工程,2013, 21(8) 2064-2070
[4]Yating Huang, Dan Guo, Xinchun Lu , Jianbin Luo, A lubrication model between the soft porous brush and rigid flat substrate for post-CMP cleaning, Microelectronic Engineering, Volume 88, Issue 9, September 2011, Pages 2862-2870
[5]YT Huang, CL Meng, NP Wu, XP Dong, XC Lu, Finite Element Analysis of Failure in Cu Interconnect Megasonic Cleaning, Key Engineering Materials 562, 1471-1476
[6]YT Huang, XP Dong, Simulation of Acoustic Field for Megasonic Bath Cleaning in Advanced Semiconductor Manufacturing, Applied Mechanics and Materials 289, 81-86